Product
Cryster series 800 (Oxide)
Oxide thin-film transistor (TFT) equipment specializes in thermal treatment to manufacture backplane substrates in the large display manufacturing process.
- #Oxide
Cryster series 600 (PI curing)
Polyimide (PI) curing equipment specializes in thermal treatment to implement a flexible substrate in the flexible display manufacturing process.
- #PI curing
Cryster series 600
Low-temperature polycrystalline silicon (LTPS) equipment specializes in contact anneal, de-hydrogenation, hydrogenation, activation, and other high-temperature thermal treatments in the AMOLED rigid/flexible display manufacturing process.
- #Contact anneal
- #De-hydrogenation
- #Hydrogenation
- #Activation
PECVD
PECVD is used to prevent moisture penetration of fiexible OLED devices. IPS PECVD has deposited SiNx thin films with optimized optical transmittance and stress for flexible OLEDs and has excellent self-cleaning performance, which can lower the production
- #SiNx depostion
- #SiON depostion
- #SiO2 depositon