List
Cryster series 800 (Oxide)
Process
Oxide
Applications
QD-OLED
Oxide TFT Backplane
(TV)
Introduction.
Oxide thin-film transistor (TFT) equipment specializes in thermal treatment to manufacture backplane substrates in the large display manufacturing process.
Technology.
This equipment specializes in oxide thermal treatment and applies IPS’s original glass in/out door systems, quartz tube heaters, and aligning structures to uniformly heat up large area substrates in Generation 8 or higher. It can provide a flat process that can immediately load substrates from the process to ensure high productivity.
Features.
1. Glass size: up to 10.5G 2. Max. temperature: up to 500℃ 3. Equipment structure specially manufactured to maintain very high temperature uniformity even in large area glass 4. Special ramp up/down optimized for high productivity 5. Special torch system (H2 + O2) which can maintain a high purity steam
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Product and technical inquiries
TEL : 82-31-831-2640 E-mail : fpd@ips.co.kr