製品紹介
WIDAS
WIDASはWINASの拡張プラットフォームで、バッチ当たりの処理能力を高め、一層向上したコアモジュール技術(Heater、Robot、 Controller)が適用されており、優れた工程能力をご提供いたします。
- # Oxidation
- #Anneal
- #Alloy
- #PI bake
- #Poly
- #ALD Ox/SiN
NOA ALD
NOA has its one and only unique feature that can integrate different metal processes andstand-alone process. Depending on users, NOA can extend its platform for different needs,which could be integrated different processes like Ti/TiN, Tungsten, and Clean
- #Ti/ALD–TiN
- #ALD-TiN
- #ALD-W
- #TOT (TiN/Ox/TiN)
GEMINI HQ
GEMINI HQ system produces dielectric films with plasma-enhanced chemical vapor deposition technology such as Anti-Reflective Coating and hardmask.
- #SiON
- #A-Si
- #TEOS
GEMINI ALD (Kairos PE-ALD)
Deposition process in forming multiple patterning films such as SADP and SAQP plays a key role as it defines critical dimensions.GEMINI ALD SYSTEM provides solution for multi-patterning applications with high-quality conformal and very uniform films.
- #ALD Oxide
- #SiN _ Ternary oxide